1600°C vacuum/atmosphere tube furnace CVD system (CVD-TF) provides an experimental environment with vacuum, controllable atmosphere and high temperature, and is used in semiconductor, nanotechnology, fiber and other fields. This CVD growth system is suitable for CVD process , such as silicon carbide coating, ceramic substrate conductivity test, controllable growth of ZnO nanostructure, ceramic capacitor (MLCC) atmosphere sintering and other experiments.
1.The furnace is made of polycrystalline mullite fiber vacuum adsorption, the temperature field is uniform and energy saving is more than 50%
2.The self-developed air diversion and heat insulation technology ensures the service life and constant temperature effect of each component in the box
3.When the electric furnace is started, the exhaust fan will automatically run at the same time. After the test, the exhaust fan will continue to run until the temperature of the furnace body is lower than 60 °C, and the exhaust fan will stop automatically, which effectively protects the surface of the furnace body.
4.The furnace door is opened with automatic power-off, over-temperature protection function, and leakage protection function to ensure the safety of use.
5.The circuit adopts continuous heating output mode, dual-circuit power supply, and separate wiring of strong and weak current improves the stability of the system
6.The heating module adopts DC signal to adjust the output power, which avoids the interference of induced electricity to the control signal.
7.Low-voltage metal buttons are used for operation buttons, with status indicator lights, safe and intuitive operation.
8.The upper and lower furnace bodies are connected by aviation plugs, which are safe, reliable and convenient to connect.
9.The gas circuit assembly is made of food grade 316 stainless steel, which has corrosion resistance, atmospheric corrosion resistance and high temperature resistance, and is non-magnetic.
10.Adopt digital flow display instrument, cooperate with mass flow controller, collect data and control flow. It has the characteristics of good repeatability, fast response speed, stability and reliability. (Gas Mass Flow Control System)
11.Automatic control and manual control switching function, the automatic control mode can automatically open/close the vacuum pump through the set value, so that the container can be kept within a certain vacuum pressure range. Manual control mode uses the user to directly operate the vacuum pump via the vacuum pump on/off button. to meet the needs of different experiments. (Medium vacuum control system)
12.The solenoid valve slow start technology makes the solenoid valve open 10 seconds after the vacuum pump is turned on, so that the system pressure in the furnace tube is kept accurate, and it also ensures that the exhaust gas will not return to the furnace tube system to affect the experimental effect (medium vacuum control system)
13.Overheating alarm, menu lock, overheating prevention, power recovery delay.
14.Using one-way valve technology, the gas flow is controlled within a controllable pressure range to ensure safety.
15.The gas mixing tank device is adopted, so that the gas can be introduced into the working room after being fully mixed to ensure that it will not leak.
Model | CVD-LTF16P50 | CVD-LTF16P60 | CVD-LTF16P80 | CVD-LTF16P100 | CVD-LTF16P60S | CVD-LTF16P80S | CVD-LTF16P100S | |||
CVD-LTF16T50 | CVD-LTF16T60 | CVD-LTF16T80 | CVD-LTF16T100 | CVD-LTF16P60S | CVD-LTF16T80S | CVD-LTF16T100S | ||||
Operating temperature range | 300~1600℃ | |||||||||
Temperature resolution | 1℃ | |||||||||
Temperature control | ± 1℃ | |||||||||
Heating rate | 0~20℃/min | |||||||||
Heating zone length | 260mm | 600mm | ||||||||
Length of constant temperature zone | 120mm | 300mm | ||||||||
degree of vacuum | -0.1MPa | |||||||||
Empty furnace heating time | ＜15min | |||||||||
Exterior | Cold-rolled steel sheet with chemical-resistant coating on the surface | |||||||||
Furnace body | Polycrystalline Mullite Fiber | |||||||||
Furnace size | 440*390*330 | 780*390*330 | ||||||||
Furnace tube | Corundum Tube | |||||||||
Furnace tube size | φ50*1000 | φ60*1000 | φ80*1000 | φ100*1000 | φ60*1200 | φ80*1200 | φ100*1200 | |||
Heater | Silicon molybdenum rod | |||||||||
Heating power | 4KW | 4KW | 10KW | 10KW | ||||||
Thermal insulation layer | Double-layer forced air diversion | |||||||||
Controller | P: Imported program temperature control digital display; T: 7-inch color touch screen program temperature control | |||||||||
Control method | Use microcomputer PID control / S-type dual temperature zone separate temperature control | |||||||||
How to set | P: Touch the five buttons for action, digital display setting; T: Touch the finger to set | |||||||||
Display method | P: Double-line LED digital display; T: Color LCD display | |||||||||
Timing | 0~999.9 hours | |||||||||
Run function | Fixed value operation, program operation | |||||||||
Program mode | P: Program running, 4 curves, 40 steps in total; T: 50 steps can call the stored program | |||||||||
Sensor | Type S thermocouple | |||||||||
Auxiliary function | P: Correction function; T: Correction function, real-time curve recording, U disk data export | |||||||||
Safety equipment | Overcurrent leakage protection switch | Overcurrent protection switch | ||||||||
Number of air paths | 3 channels (the number of air channels can be selected according to specific needs) | |||||||||
Flow range | 0-0500sccm (standard ml/min, optional) nitrogen standard | |||||||||
Precision | ±1%F.S | |||||||||
Response time | ≤4s | |||||||||
Operating temperature (flow meter) | 5-45℃ | |||||||||
Work pressure | Inlet pressure 0.05-0.3MPa (gauge pressure) | |||||||||
System connection | Adopt KF quick connection bellows, high vacuum manual flapper valve and digital display vacuum measuring instrument | |||||||||
System vacuum range | 10-100Pa | |||||||||
Vacuum pump | The theoretical ultimate vacuum degree of the two-stage mechanical pump is 3x10-1Pa, the pumping rate is 4L/s, the air outlet is equipped with an oil filter, the rated voltage is 200V, and the power is 0.55Kw | |||||||||
CVD system configuration | 1600 degree vacuum tube furnace (optional single temperature zone, double temperature zone) Multi-channel mass flow control system Vacuum system | |||||||||
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