Provide an experimental environment with vacuum, controllable atmosphere and high temperature, used in semiconductor, nanotechnology, carbon fiber and other fields.
This CVD growth system is suitable for CVD processes, such as silicon carbide coating, ceramic substrate conductivity testing, controlled growth of ZnO nanostructures, and MLCC atmosphere sintering experiments.
1.The furnace is made of polycrystalline mullite fiber vacuum adsorption, the temperature field is uniform and energy saving is more than 50%
2.The self-developed air diversion and heat insulation technology ensures the service life and constant temperature effect of each component in the box
3.When the electric furnace is started, the exhaust fan will automatically run at the same time. After the test, the exhaust fan will continue to run until the temperature of the furnace body is lower than 60 °C, and the exhaust fan will stop automatically, which effectively protects the surface of the furnace body.
4.The furnace door is opened with automatic power-off, over-temperature protection function, and leakage protection function to ensure the safety of use.
5.The circuit adopts continuous heating output mode, dual-circuit power supply, and separate wiring of strong and weak current improves the stability of the system
6.The heating module adopts DC signal to adjust the output power, which avoids the interference of induced electricity to the control signal.
7.Low-voltage metal buttons are used for operation buttons, with status indicator lights, safe and intuitive operation.
8.The upper and lower furnace bodies are connected by aviation plugs, which are safe, reliable and convenient to connect.
9.The gas circuit assembly is made of food grade 316 stainless steel, which has corrosion resistance, atmospheric corrosion resistance and high temperature resistance, and is non-magnetic
10.Adopt digital flow display instrument, cooperate with mass flow controller, collect data and control flow. It has the characteristics of good repeatability, fast response speed, stability and reliability. (Gas Mass Flow Control System)
11.Automatic control and manual control switching function, the automatic control mode can automatically open/close the vacuum pump through the set value, so that the container can be kept within a certain vacuum pressure range. Manual control mode uses the user to directly operate the vacuum pump via the vacuum pump on/off button. to meet the needs of different experiments. (Medium vacuum control system)
12.The solenoid valve slow start technology makes the solenoid valve open 10 seconds after the vacuum pump is turned on, so that the system pressure in the furnace tube is kept accurate, and it also ensures that the exhaust gas will not return to the furnace tube system to affect the experimental effect (medium vacuum control system)
Model | CVD-LTF12P50 | CVD-LTF12P60 | CVD-LTF12P80 | CVD-LTF12P100 |
CVD-LTF12T50 | CVD-LTF12T60 | CVD-LTF12T80 | CVD-LTF12T100 | |
CVD-LTF12P50S | CVD-LTF12P60S | CVD-LTF12P80S | CVD-LTF12P100S | |
CVD-LTF12T50S | CVD-LTF12T60S | CVD-LTF12T80S | CVD-LTF12T100S | |
Operating temperature range | 300-1200°C | |||
temperature resolution | 1°C | |||
temperature accuracy | ±1°C | |||
Heating rate | 0-20°C/min | |||
Heating zone length | 420mm | |||
Length of constant temperature zone | Single temperature zone：210mm；Double temperature zone：280mm | |||
maximum vacuum | -0.1MP3 | |||
Empty furnace heating time | ≤15min | |||
Heating rate when configuring furnace tube | Below 500°C≤5°C/min； 500-800≤ 10°C/min； 800-1000≤5°C/min； 1000-1200≤2t°C/min | |||
Exterior | Cold-rolled steel sheets - surface chemical resistant coating | |||
Furnace body | Polycrystalline Mullite Fiber | |||
Furnace size | Outside：φ240-550mm；Inner：φ120*420mm | |||
Furnace tube | Quartz tube | |||
Furnace tube size | φ50/43*1000 | φ 60/53*1000 | φ80/72*1000 | φ 100/92*1000 |
Heater | Nickel-chromium-aluminum alloy wire OCr27A17MO2 | |||
Heating power | Single temperature zone：3KW：Double temperature zone：3.2KW | |||
Thermal insulation layer | Double-layer forced air diversion | |||
Open way | Clamshell back flip (about 100 degrees) | |||
Controller | P: Imported program temperature control digital display; T: 7-inch color touch screen program temperature control | |||
Control method | Using microcomputer PID control / S-type dual temperature zone single temperature control | |||
Set type | P: Touch five buttons for action, digital display setting; T: Finger touch and tap to set | |||
Display method | P: double-line LED digital display; T: color LCD display | |||
Timing | 0-999.9h | |||
Run function | Fixed value operation. Program operation | |||
Program mode | P: Program running, 4 curves, a total of 40 steps; T: Maximum 50 steps, the stored program can be called | |||
Sensor | Type K thermocouple | |||
Auxiliary function | P: Correction function; T: Correction function, real-time curve recording, U disk data export | |||
Safety equipment | Overcurrent leakage protection switch | |||
Number of air paths | 3 channels (the number of air channels can be selected according to specific needs) | |||
Flow range | 0-0500sccm (Standard ml/min, optional) Nitrogen standard | |||
Precision | ±1%F.S | |||
Response time | ≤4s | |||
Operating temperature (flow meter) | 5-45°C | |||
Work pressure | Inlet pressure 0.05-0.3MPa (gauge pressure) | |||
System connection | Adopt KF quick connection bellows, high vacuum manual flapper valve and digital display vacuum measuring instrument | |||
System vacuum range | 10-100Pa | |||
Vacuum pump | The theoretical ultimate vacuum degree of the two-stage mechanical pump is 3×10-1Pa, the pumping rate is 4L/S, the air outlet is equipped with an oil filter, the rated voltage is 200V, and the power is 0.55Kw | |||
CVD system configuration | 1200 degree open vacuum tube furnace (optional single temperature zone, double temperature zone) Multi-channel mass flow control system twisted vacuum system | |||
Furnace body dimensions | 980mm*400mm*600mm | |||
System Dimensions | 770mm*580mm*778mm | |||
Total system weight | 210kg | |||
We have a standard production workshop and a complete production team. They always produce a serious and responsible attitude to produce each product. Our R&D team is made up of multi-aspects professional engineers such as design engineer,technology specialist ,qualified specialist and process control manager, etc. Our qualified specialists strictly realize the process comprehensive supervision based on our quality process control system, which contains products design, research and development, test, production, quality inspection and packaging.
Our laboratory instruments and equipment are used in many scientific laboratories, scientific research institutions, universities, hospitals, centers for disease control and other institutions, and are combined with many well-known biopharmaceuticals, new energy, electronics companies, food processing, environmental protection, etc. Enterprise cooperation, our stable and reliable products are exported to more than 120 countries around the world, and have been highly recognized by them, believe LABOAO, we grow together!
