Provides an experimental environment with vacuum, controlled atmosphere and high temperature.
This CVD growth system is suitable for CVD processes, such as silicon carbide coating, ceramic substrate conductivity testing, controlled growth of ZnO nanostructures, and MLCC atmosphere sintering experiments.
1. The furnace is made of polycrystalline mullite fiber vacuum adsorption, the temperature field is uniform and energy saving is more than 50%
2. Air diversion and heat insulation technology ensures the service life and constant temperature effect of each component in the box
3. Start the electric furnace, and the exhaust fan will run automatically at the same time. After the test, the exhaust fan will continue to run until the temperature of the furnace body is lower than 60 °C, and the exhaust fan will stop automatically, which effectively protects the surface of the furnace body.
4. Automatic power-off, over-temperature protection function, leakage protection function to ensure the safety of use
5. The circuit adopts continuous heating output mode, dual-circuit power supply, and separate wiring of strong and weak current improves the stability of the system
6. The heating module adopts DC signal to adjust the output power, which avoids the interference of induced electricity to the control signal.
7. Automatic compensation for the temperature control effect caused by temperature or aging on the resistance value change of the silicon carbide rod, avoiding the inaccuracy and danger of artificial adjustment
8. Adopt digital flow display instrument, cooperate with mass flow controller, collect data and control flow. It has the characteristics of good repeatability, fast response speed, stability and reliability. (Gas Mass Flow Control System)
9. Automatic control and manual control switching function, the automatic control mode can automatically turn on/off the vacuum pump through the set value to keep the container within a certain vacuum pressure range. Manual control mode uses the user to directly operate the vacuum pump via the vacuum pump on/off button. to meet the needs of different experiments. (Medium vacuum control system)
10 Solenoid valve slow start technology, so that the solenoid valve is opened 10 seconds after the vacuum pump is turned on, so that the system pressure in the furnace tube is kept accurate, and it also ensures that the exhaust gas will not return to the furnace tube system to affect the experimental effect (medium vacuum control system)
Model | CVD-LTF14P40 | CVD-LTF14P50 | CVD-LTF14P60 | CVD-LTF14P80 |
CVD-LTF14T40 | CVD-LTF14T50 | CVD-LTF14T60 | CVD-LTF14T80 | |
Operating temperature range | 300~1400℃ | |||
Temperature resolution | 1℃ | |||
Temperature control | ± 1℃ | |||
Heating rate | 0~20℃/min | |||
Heating zone length | 200mm | 400mm | ||
Length of constant temperature zone | 70mm | 140mm | ||
degree of vacuum | -0.1MPa | |||
Empty furnace heating time | ≤15min | |||
Heating rate when configuring furnace tube | Below 500℃ ≤5℃/min；500-1000≤10℃/min；1000-1200≤5℃/min；1000-1400≤2℃/min | |||
Exterior | Cold-rolled steel sheet with chemical-resistant coating on the surface | |||
Furnace body | Polycrystalline Mullite Fiber | |||
Furnace size | 360*350*350mm | 560*350*350mm | ||
Furnace tube | Corundum Tube | |||
Furnace tube size | Φ40/34*1000 | Φ50/44*1000 | Φ60/50*1000 | Φ80/70*1000 |
Heater | Silicon carbide rod | |||
Heating power | 3KW | 5KW | ||
Thermal insulation layer | Double-layer forced air diversion | |||
Open way | No | |||
Controller | P: Imported program temperature control digital display; T: 7-inch color touch screen program temperature control | |||
Control method | Using microcomputer PID control | |||
How to set | P: Touch five buttons for action, digital display setting; T: Finger touch and tap to set | |||
Display method | P: Double-line LED digital display; T: Color LCD display | |||
Timing | 0~999.9 hours | |||
Run function | Fixed value operation, program operation | |||
Program mode | P: Program running, 4 curves, a total of 40 steps; T: 50 steps can call the stored program | |||
Sensor | Type S thermocouple | |||
Auxiliary function | P: Correction function; T: Correction function, real-time curve recording, U disk data export | |||
Safety equipment | Overcurrent leakage protection switch | |||
Number of air paths | 3 channels (the number of air channels can be selected according to specific needs) | |||
Flow range | 0-0500sccm (standard ml/min, optional) nitrogen standard ±1%F.S | |||
Precision | ||||
Response time | ≤4s | |||
Operating temperature (flow meter) | 5-45℃ | |||
Work pressure | Inlet pressure 0.05-0.3MPa (gauge pressure) | |||
System connection | Adopt KF quick connection bellows, high vacuum manual flapper valve and digital display vacuum measuring instrument | |||
System vacuum range | 10-100Pa | |||
Vacuum pump | The theoretical ultimate vacuum degree of the two-stage mechanical pump is 3x10-1Pa, the pumping rate is 4L/s, the air outlet is equipped with an oil filter, the rated voltage is 200V, and the power is 0.55Kw | |||
CVD system configuration | 1400 degree vacuum tube furnace Multi-channel mass flow control system Vacuum system | |||
We have a standard production workshop and a complete production team. They always produce a serious and responsible attitude to produce each product. Our R&D team is made up of multi-aspects professional engineers such as design engineer,technology specialist ,qualified specialist and process control manager, etc. Our qualified specialists strictly realize the process comprehensive supervision based on our quality process control system, which contains products design, research and development, test, production, quality inspection and packaging.
Our laboratory instruments and equipment are used in many scientific laboratories, scientific research institutions, universities, hospitals, centers for disease control and other institutions, and are combined with many well-known biopharmaceuticals, new energy, electronics companies, food processing, environmental protection, etc. Enterprise cooperation, our stable and reliable products are exported to more than 120 countries around the world, and have been highly recognized by them, believe LABOAO, we grow together!
